论文标题
紧凑的片上结晶谐振器与蚀刻锥形波导的整合
Compact On-Chip crystalline Resonator Integration with Etching Tapered Fiber Waveguide
论文作者
论文摘要
窃窃私语模式的晶体谐振器当前保持最佳质量因子（Q）记录，但是，尽管已经开发了各种耦合体系结构，但紧凑的片上包装仍然是一个挑战。在这里，提出了一种化学蚀刻方法，以在硅底物上制造微型锥形纤维波导。实施Marangoni效应以降低锥体区域的表面粗糙度。获得了0.1 dB/mm的光损，并且片上晶体谐振器的Q超过108。此外，将TEC植入包装中以积极自定义温度，并且18 pm/k的温度响应与理论计算一致。
Whispering-gallery mode crystalline resonators currently maintain the best quality factor (Q) record, however, compact on-chip packaging is still a challenge although various coupling architectures have been developed. Here, a chemical etching method is proposed to fabricate a miniaturized tapered fiber waveguide on silicon substrate. The Marangoni effect is implemented to reduce the surface roughness of the cone region. The optical loss of 0.1 dB/mm is obtained, and the Q of on-chip crystalline resonator exceeds 108. Additionally, TEC is implanted in the package to actively customize the temperature, and the temperature response of 18 pm/K is consistent with the theoretical calculation.
