论文标题
牛：动力学检测器感测的颗粒吸收器的整体阵列
BULLKID: Monolithic array of particle absorbers sensed by Kinetic Inductance Detectors
论文作者
论文摘要
我们介绍了Bullkid，这是一种创新的声子检测器，该检测器由一系列滴度组成，用作颗粒吸收器，可通过多重动力学电感探测器（KIDS）感测。将烤面包成厚的结晶晶片，形成单片结构。这些雕刻在晶圆上留下了一个薄薄的常见磁盘，既充当底部的持有者，又充当儿童光刻的底物。提出的原型由64个阵列组成5.4x5.4x5毫米$ $^3 $，直径为3英寸，5毫米厚的硅晶片刻有3英寸的雕刻，并具有一个常见的0.5毫米厚度，厚度为60 nm厚的图案图案化的铝层，但避免了每种零件的零件，但避免了该零件的实用性。数组需要优化，具有相似功能的8个单元的操作平均显示了$ 26 \ pm7 $ eV的基线能量分辨率。
We introduce BULLKID, an innovative phonon detector consisting of an array of dices acting as particle absorbers sensed by multiplexed Kinetic Inductance Detectors (KIDs). The dices are carved in a thick crystalline wafer and form a monolithic structure. The carvings leave a thin common disk intact in the wafer, acting both as holder for the dices and as substrate for the KID lithography. The prototype presented consists of an array of 64 dices of 5.4x5.4x5 mm$^3$ carved in a 3" diameter, 5 mm thick silicon wafer, with a common disk 0.5 mm thick hosting a 60 nm patterned aluminum layer. The resulting array is highly segmented but avoids the use of dedicated holding structures for each unit. Despite the fact that the uniformity of the KID electrical response across the array needs optimization, the operation of 8 units with similar features shows, on average, a baseline energy resolution of $26\pm7$ eV. This makes it a suitable detector for low-energy processes such as direct interactions of dark matter and coherent elastic neutrino-nucleus scattering.
