论文标题
单发，连贯的，弹出的3D计量
Single-shot, coherent, pop-out 3D metrology
论文作者
论文摘要
在纳米分辨率下进行薄的，扩展标本的三维（3D）成像对于在生物学，材料科学，高级合成和制造中的应用至关重要。到达3D成像的一条途径是层析成像，它需要一个倾斜的局部区域。在这里，我们描述了一种连贯的成像替代方案，该替代方案恢复了仅具有单个能量过滤的明亮场图像的薄均匀无定形标本的3D体积。我们用透射电子显微镜证明了这一技术，以填补明显的空白，以快速，易于访问，无损3D纳米量表学。通常，该技术适用于与电子，光子或任何其他波浪颗粒的任何一致的明亮场成像。
Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. Here we describe a coherent imaging alternative that recovers the 3D volume of a thin, homogeneously amorphous specimen with only a single, energy-filtered, bright-field image. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible, non-destructive 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles.
