论文标题
跨耗散限制的NEM谐振器的动力学
Dynamics of NEMS Resonators across Dissipation Limits
论文作者
论文摘要
纳米机电系统(NEM)的振荡动力学是纳米技术中许多新兴应用的核心。对于常见的NEM,例如梁和字符串,使用弹性衍生的无耗散波方程来制定振荡动力学。在谐波ansatz下,波方程给出了未阻尼的自由振动方程。在适当的边界条件下求解此方程提供了具有熟悉的站立波模式的未阻尼征征。任何和谐驱动的解决方案均以这些未阻尼的本征函数来表达。在这里,我们表明,随着耗散的增加,这种形式主义变得不方便。为此,我们在不同的耗散限制下,通过非对称力在一端的一端通过非对称力线性地驱动NEMS弦谐振的位置和频率依赖性振荡运动。在低耗散(高Q因子)下,我们观察到具有站立波模式的尖锐共振,这些共振与未阻尼串的本征函数非常匹配。随着耗散的略有增加,驻波模式丢失,波浪开始沿纳米结构传播。在很大的耗散(低Q因子)下,这些传播波被强烈减弱,几乎没有显示(如果有的话),与未阻尼的弦征征相似。可以通过沿纳米结构传播的波的叠加来获得对NEMS谐振器的振荡动力学的更有效和直观的描述。
The oscillatory dynamics of nanoelectromechanical systems (NEMS) is at the heart of many emerging applications in nanotechnology. For common NEMS, such as beams and strings, the oscillatory dynamics is formulated using a dissipationless wave equation derived from elasticity. Under a harmonic ansatz, the wave equation gives an undamped free vibration equation; solving this equation with the proper boundary conditions provides the undamped eigenfunctions with the familiar standing wave patterns. Any harmonically driven solution is expressible in terms of these undamped eigenfunctions. Here, we show that this formalism becomes inconvenient as dissipation increases. To this end, we experimentally map out the position- and frequency-dependent oscillatory motion of a NEMS string resonator driven linearly by a non-symmetric force on one end at different dissipation limits. At low dissipation (high Q factor), we observe sharp resonances with standing wave patterns that closely match the eigenfunctions of an undamped string. With a slight increase in dissipation, the standing wave patterns become lost and waves begin to propagate along the nanostructure. At large dissipation (low Q factor), these propagating waves become strongly attenuated and display little, if any, resemblance to the undamped string eigenfunctions. A more efficient and intuitive description of the oscillatory dynamics of a NEMS resonator can be obtained by superposition of waves propagating along the nanostructure.