论文标题
高响应性MOS $ _2 $热电子电信波段光电探测器与微孔谐振器集成
High-responsivity MoS$_2$ hot-electron telecom-band photodetector integrated with microring resonator
论文作者
论文摘要
我们报告了基于Au-mos $ _2 $ _2 $连接与氮化硅微孔谐振器(MRR)的集成基于用于检测电信波段光线的高响应性热电子光电探测器。硝化硅MRR与Au-Mos $ _2 $ Schottky交界处区域的Evanevancent Fielt耦合提高了热电子注入效率。该设备在1516 nm的波长下表现出154.6 mA W-1的高响应性,并且在1500 nm-1630 nm的波长范围内获得了中等均匀的疾病。此MRR增强的MOS2热电子光电探测器为集成光电系统提供了可能性。
We report a high-responsive hot-electron photodetector based on the integration of an Au-MoS$_2$ junction with a silicon nitride microring resonator (MRR) for detecting telecom-band light. The coupling of the evanescent field of the silicon nitride MRR with the Au-MoS$_2$ Schottky junction region enhances the hot-electron injection efficiency. The device exhibits a high responsivity of 154.6 mA W-1 at the wavelength of 1516 nm, and the moderately uniform responsivities are obtained over the wavelength range of 1500 nm-1630 nm. This MRR-enhanced MoS2 hot-electron photodetector offers possibilities for integrated optoelectronic systems.