论文标题
在（al $ _ {x} $ ga $ _ {1-x} $）$ _ {2} $ o $ $ $ _ {3} $/ga $ _ {2} $ _ {2} $ $ _ {3} $ _ {3} $ HETEROSTRUCTURSURES，
Full-band Monte Carlo simulation of two-dimensional electron gas in (Al$_{x}$Ga$_{1-x}$)$_{2}$O$_{3}$/Ga$_{2}$O$_{3}$ heterostructures
论文作者
论文摘要
$β$ - 氧化物（GA $ _ {2} $ o $ _ {3} $）是对电源电子和RF开关的潜在应用的广泛研究的超速型袋式半导体。室温散装电子移动性（$ \ sim $ 200 cm $^{2} $ v $^{ - 1} $ s $^{ - 1} $）相对较低，并且受到源自其10个原子原始单元的30个声子模式的限制。理论上计算的饱和速度为1-2 $ \ times $ 10 $^{7} $ cms $^{ - 1} $，与gan相当。根据第一个原理计算的参数，在这项工作中探索了2DEG中的高场电子传输。在给定的异质结构设计上进行的自洽计算给出了狭窄的征征和征素能。考虑到LO拼音性筛选，根据费米的黄金法则计算内部内带和子带散射率。高场特征是从300 K处的异质结构的全带蒙特卡洛模拟中提取的。2DEG中电子的运动和大量通过集成的蒙特卡洛计划进行处理，该计划以几个异质结构设计，以输出稳态区域人群，瞬态动力学和速度场曲线。饱和度的临界场不会从大容量值中显着变化，但是在较高的2DEG密度下计算了改善的峰值速度。低2DEG密度的速度受到LO声子的抗验影响，该声子在塑造区域人群中起着重要作用。还进行了与实验测量的比较，并讨论了实验的差异的可能起源。
$β$-Gallium Oxide (Ga$_{2}$O$_{3}$) is an extensively investigated ultrawide-bandgap semiconductor for potential applications in power electronics and RF switching. The room temperature bulk electron mobility ($\sim$200 cm$^{2}$V$^{-1}$s$^{-1}$) is comparatively low and is limited by the 30 phonon modes originating from its 10-atom primitive cell. The theoretically calculated saturation velocity is 1-2$\times$10$^{7}$ cms$^{-1}$ which is comparable to GaN. The high field electron transport in the 2DEG is explored in this work based on the first principles calculated parameters. A self-consistent calculation on a given heterostructure design gives the confined eigenfunctions and eigenenergies. The intrasubband and the intersubband scattering rates are calculated based on the Fermi's golden rule considering LO phonon-plasmon screening. The high field characteristics are extracted from the full-band Monte Carlo simulation of heterostructures at 300 K. The motion of electrons in the 2DEG and the bulk is treated through an integrated Monte Carlo program which outputs the steady state zone population, transient dynamics and the velocity-field curves for a few heterostructure designs. The critical field for saturation does not change significantly from bulk values, however an improved peak velocity is calculated at a higher 2DEG density. The velocity at low 2DEG densities is impacted by the antiscreening of LO phonons which plays an important role in shaping the zone population. A comparison with the experimental measurements is also carried out and possible origins of the discrepancies with experiments is discussed.
