论文标题
通过聚焦离子光束铣削的几何和尺寸优先的分子单晶微谐振器的微制造
Micromanufacturing of geometrically- and dimensionally-precise molecular single-crystal photonic micro-resonators via focused ion beam milling
论文作者
论文摘要
具有明确定义的几何形状和尺寸的有机光学晶体的高度可再现的制造对于实现工业相关的全有机微电源和纳米光子组件以及光子整合电路很重要。在这里，我们使用聚焦 - 离子束铣削技术展示了围层晶体谐振器的编程形状和尺寸变化。由于使用的技术的高度可重复的性质，因此，制造的较小尺寸的磁盘和矩形晶体谐振器显示出形状和尺寸依赖性光学模式，适用于商业纳米光子应用。
Highly reproducible manufacturing of organic optical crystals with well-defined geometry and dimension is important to realize industrially relevant all-organic microelectronic and nanophotonic components, and photonic integrated circuits. Here, we demonstrate programmed shape and size alteration of perylene crystal resonators into disk and rectangular geometries using focused-ion beam milling technique. Due to highly reproducible nature of the employed technique, the fabricated smaller sized disk and rectangular crystal resonators displaying shape and size dependent optical modes are suitable for commercial nanophotonic applications.
