论文标题
宏观动力学以及晶体和外延层的生长
Macrosteps dynamics and the growth of crystals and epitaxial layers
论文作者
论文摘要
使用各种表面动力学模型分析了生长过程过程中阴道表面的阶跃模式稳定性。结果表明,对典型表面的标准分析对可能的步骤结合没有任何迹象,因此不能用来阐明在生长过程中创造宏观史普。不稳定性的场景,领先的GO宏观创建是基于步骤火车的动力学。关键是在火车后部的阶梯运动,这会导致双步创建和多个步骤。条件是,无论动力学,阶跃密度比进出列出的列车低于2都会阻止双步形成。对于较高的阶跃密度比,步骤的低密度可促进单步稳定性。来自Lower Terrace的快速步骤动力学稳定了单步慢(高屏障)正在促进阶跃合并。来自上露台角色的掺入动力学接近中立。 Double Step的创建会使前面的步骤减慢,以加速并捕捉上一个双步,而这些步骤却赶上了双步,创建了多步结构。多步并不是移动的,因为食化会导致向前移动的单个步骤的发射。最终结构由宏观和超级架构组成,并具有向前移动的单个步骤的数量。因此,尽管存在宏观稳定,但单步运动是必需的晶体生长模式。宏观遗传很容易产生悬垂,这是由于表面动力学耦合到母阶段撞击而产生的。散装材料向大史普边缘的角度优先访问,导致扩散不稳定。因此,可以预期,通过产生包含物和脱位,宏观库的有害影响会在液相生长过程中更强。
Step pattern stability of the vicinal surfaces during growth was analyzed using various surface kinetic models. It was shown that standard analysis of the vicinal surfaces provides no indication on the possible step coalescence and therefore could not be used to elucidate macrostep creation during growth. A scenario of the instability, leading go macrostep creation was based on the dynamics of the step train. The critical is step motion at the rear of the train which leads to double and multiple step creation. The condition is that the step density ratio in and out of the train lower than 2 prevents double step formation irrespective of the kinetics. For higher step density ratio low density of the step promotes single step stability. Fast step kinetics from lower terrace stabilizes the single steps slow (high barrier) is promoting step coalescence. The incorporation kinetics from upper terrace role is close to neutral. The creation of double step creates slow the step in front to accelerate and catch the previous double step while those behind catch up the double step creating multistep structure. The multistep are not mobile as the alimentation leads to emission of single step which moves forward. The final structure consist of macrosteps and superterraces with the number of single steps moving forward. Thus the single step motion is essential crystal growth mode despite the presence of the macrosteps. The macrostep are prone to creation of the overhangs which results from surface dynamics coupling to impingement from the mother phase. The angular preferential access of the bulk material to the macrostep edge, leads to diffusive instability. Therefore it is expected that harmful influence of the macrosteps by creation of inclusions and dislocation is stronger during growth from the liquid phase.