论文标题
耗散纳米力学谐振器中非线性阻尼的建模和观察
Modelling and observation of nonlinear damping in dissipation-diluted nanomechanical resonators
论文作者
论文摘要
耗散稀释能够在压力高的比率纳米力学谐振器（例如弦或膜）中极低的线性损失。在这里，我们报告了此类结构中非线性耗散的观察和理论建模。我们介绍了基于vonKármán理论的分析模型，该模型可以使用有限元模型进行数值评估。我们使用这种方法来预测超晶格的语音膜谐振器中的非线性损失和（行李）频移。一组使用氮化硅膜的系统测量与低阶软钳型模式的模型显示出良好的一致性。我们的分析还揭示了这些非线性与耗散稀释之间的定量联系。这对于将来的设备设计引起了人们的关注，并且可以在诊断实验环境中诊断耗散稀释的性能时提供重要的见解。
Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such structures. We introduce an analytical model based on von Kármán theory, which can be numerically evaluated using finite-element models for arbitrary geometries. We use this approach to predict nonlinear loss and (Duffing) frequency shift in ultracoherent phononic membrane resonators. A set of systematic measurements with silicon nitride membranes shows good agreement with the model for low-order soft-clamped modes. Our analysis also reveals quantitative connections between these nonlinearities and dissipation dilution. This is of interest for future device design, and can provide important insight when diagnosing the performance of dissipation dilution in an experimental setting.
