论文标题

关于固定电压电流图的逆掺杂轮廓问题

On inverse doping profile problems for the stationary voltage-current map

论文作者

Leitao, A., Markowich, P. A., Zubelli, J. P.

论文摘要

我们考虑从\ s固定电压电流图获得的数据中识别半导体设备中可能不连续的掺杂曲线的问题。特别是,我们专注于所谓的单极病例,即直接从漂移扩散方程得出的PDE系统。相关的反问题对应于部分数据的电导率问题。 考虑了此反问题的识别问题。特别是,对于该问题的离散版本,我们得出了与扩散断层扫描理论相关的结果。提出了使用级别集方法的标识问题的数值方法。我们的方法与文献中的先前结果进行了比较,其中使用Landweber-Kaczmarz型方法来解决类似的问题。

We consider the problem of identifying possibly discontinuous doping profiles in semiconductor devices from data obtained by\,stationary voltage-current maps. In particular, we focus on the so-called unipolar case, a system of PDE's derived directly from the drift diffusion equations. The related inverse problem corresponds to an inverse conductivity problem with partial data. The identification issue for this inverse problem is considered. In particular, for a discretized version of the problem, we derive a result connected to diffusion tomography theory. A numerical approach for the identification problem using level set methods is presented. Our method is compared with previous results in the literature, where Landweber-Kaczmarz type methods were used to solve a similar problem.

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