论文标题
多孔纳米结构薄膜的2D弹道沉积的模拟
Simulation of 2D ballistic deposition of porous nanostructured thin-films
论文作者
论文摘要
已经开发了“二维弹道沉积”（2D-BD）代码，以研究薄膜生长的弹道沉积中的几何影响。圆盘被用作沉积的规格，以了解薄膜演变过程中的阴影效果。我们对沉积角度进行了2D-BD模拟$ 20^0 $ - $ 80^0 $ in Steps $ 10^0 $。标准偏差$ 1^0 $，$ 2^0 $，$ 4^0 $，$ 6^0 $和$ 10^0 $用于每个沉积角度，光盘尺寸为$ 1.5 \ overset {\ circ} {a} $，以了解其对薄纱微观结构的影响。已经研究了上述沉积角度及其标准偏差的生长角度，孔隙率和表面粗糙度特性。已经进行了不同大小圆盘的弹道沉积模拟，以了解大小在弹道沉积中的影响。将该代码的结果与可用的理论和实验结果进行了比较。该代码用于模拟准确的盖帽角度沉积（C-GLAD）实验。我们为存款的各种特征获得了良好的定性匹配。
A "two-dimensional ballistic deposition" (2D-BD) code has been developed to study the geometric effects in ballistic deposition of thin-film growth. Circular discs are used as depositing specie to understand the shadowing effects during the evolution of a thin-film. We carried out the 2D-BD simulations for the angles of deposition $20^0$-$80^0$ in steps of $10^0$. Standard deviations $1^0$, $2^0$, $4^0$, $6^0$ and $10^0$ are used for each angle of deposition with disc size of $1.5 \overset{\circ}{A}$ to understand its effect on the microstructure of the thin-films. Angle of growth, porosity and surface roughness properties have been studied for the afore-mentioned angles of deposition and their standard deviations. Ballistic deposition simulations with the discs of different sizes have been carried out to understand the effect of size in ballistic deposition. The results from this code are compared with the available theoretical and experimental results. The code is used to simulate a collimated glancing angle deposition (C-GLAD) experiment. We obtain a good qualitative match for various features of the deposits.
