论文标题
纳米颗粒的确定性沉积，分辨率低于10 nm
Deterministic Deposition of Nanoparticles with Sub-10 nm Resolution
论文作者
论文摘要
纳米颗粒在底物上定义的位置的准确沉积仍然是一项艰巨的任务，因为它需要同时稳定的远程运输和吸引到目标位点，并精确的短程方向和沉积。在这里，我们提出了一种基于纳米流体缝隙中几何诱导的能量景观的方法，用于颗粒操纵：布朗电动机或电渗透流用于粒子到目标区域。在目标部位，静电捕获定位并使颗粒定位。最后，缩小缝隙的间隙距离依次导致粒子位置的聚焦，并通过几种纳米跳入粘合剂接触。对于60 nm的金球，我们获得了8 nm的放置精度。该方法的多功能性通过纳米棒的堆叠组件和INAS纳米线的定向沉积进一步证明。
Accurate deposition of nanoparticles at defined positions on a substrate is still a challenging task, because it requires simultaneously stable long-range transport and attraction to the target site and precise short-range orientation and deposition. Here we present a method based on geometry-induced energy landscapes in a nanofluidic slit for particle manipulation: Brownian motors or electro-osmotic flows are used for particle delivery to the target area. At the target site, electrostatic trapping localizes and orients the particles. Finally, reducing the gap distance of the slit leads sequentially to a focusing of the particle position and a jump into adhesive contact by several nanometers. For 60 nm gold spheres, we obtain a placement accuracy of 8 nm. The versatility of the method is demonstrated further by a stacked assembly of nanorods and the directed deposition of InAs nanowires.
