论文标题

bi2O3玻璃粉中银糊的影响对欧姆触点的制造及其在太阳能电池中的潜在有效性和集成电路对P型硅底物的影响

The influence of Bi2O3 glass powder in silver paste on the fabrication of ohmic contacts and its potential effectiveness in solar cells and integrated circuits on p-type silicon substrates

论文作者

Tsai, Jung Ting, Lin, Li Kai, Lin, Shun Tian, Stanciu, Lia, Jun, Martin Byung Guk

论文摘要

目前的工作严格研究了低融化玻璃对金属接触的制造的影响,目的是推进基于二抗二氧化碳的氧化物玻璃和丝网印刷的银触点的应用,以用于集成电路(ICS),太阳能电池和传感器。在这项研究中,通过主要由银色粉末,BI2O3玻璃粉和无环粘合剂组成的丝网印刷复合糊制作新型电极触点,然后将糊状物涂在皮带炉中。在不同的腐蚀条件下观察到在830至890°C发射后的复合膜的微观结构,并用X射线衍射(XRD)和转移长度方法(TLM)分析所得层。一系列确定BI2O3玻璃在银糊中的影响的研究涉及各种测试,包括差分热分析(DTA),扫描电子显微镜(SEM),电子探针X射线微分析(EPMA),次级离子质谱法(SIMS)和与IIC的效果相混合的金属效果,并确定与IIC的影响。据观察,添加剂的BI2O3玻璃控制了银将玻璃融化,从而影响了Ag晶体的沉淀。此外,确认了燃料温度的升高导致Ag晶体和电流泄漏的过度生长,并且确认了BI2O3玻璃中Ag晶体的大小和关系。

The present work critically investigates the influence of low melting glasses on the fabrication of metal contacts, with the goal of advancing applications of bismuth based oxide glass and screen printed silver contacts for use in integrated circuits (ICs), solar cells, and sensors. In this study, novel electrode contacts were fabricated by screen printing composite pastes composed of mainly silver powder, Bi2O3 glass powder, and acyclic binder, and then firing the pastes in a belt furnace. The microstructures of the composite films after firing at 830 to 890 °C were observed under different corrosion conditions, and the resulting layers were analyzed with X ray diffraction (XRD) and the transfer length method (TLM). A series of investigations to determine the influence of Bi2O3 glass in silver paste involved various tests, including differential thermal analysis (DTA), scanning electron microscopy (SEM), electron probe X ray microanalysis (EPMA), secondary ion mass spectrometry (SIMS) and transmission electron microscopy (TEM), to determine the effects of Bi2O3 mixed with silver and the efficacy of the resulting metal contacts in IC fabrications. It was observed that the additive, Bi2O3 glass, controlled the melting of the silver into the glass, influencing the precipitation of Ag crystallites. In addition, an increase in the firing temperature caused excessive growth of Ag crystallites and current leakage, and the size and the relationship of the Ag crystallites in the Bi2O3 glass were confirmed.

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