论文标题

电阻AC耦合硅探测器:梁测试和激光数据的组合分析的运行原理和首先结果

Resistive AC-Coupled Silicon Detectors: principles of operation and first results from a combined analysis of beam test and laser data

论文作者

Tornago, M., Arcidiacono, R., Cartiglia, N., Costa, M., Ferrero, M., Mandurrino, M., Siviero, F., Sola, V., Staiano, A., Apresyan, A., Di Petrillo, K., Heller, R., Los, S., Borghi, G., Boscardin, M., Betta, G-F Dalla, Ficorella, F., Pancheri, L., Paternoster, G., Sadrozinski, H., Seiden, A.

论文摘要

本文介绍了使用激光和梁测试数据的组合分析使用电阻AC耦合硅探测器(RSD)的运行原理以及时间和空间分辨率的测量。 RSD是一种基于低增益雪崩二极管(LGAD)技术的新型N-in-P硅传感器,在该技术中,$ N^+$植入物的设计具有电阻性,并且通过AC耦合获得了读出。 RSD的真正创新特征是,撞击粒子产生的信号在多个读出垫中共享,而无需浮动电极或外部磁场。仔细调整氧化物厚度和$ n^+$掺杂配置文件是该设备成功运行的基础。几种具有不同垫宽度几何形状的RSD矩阵已经在Torino的创新硅传感器实验室中进行了激光设置,已通过激光设置进行了广泛的测试,而在Fermilab测试束设施中,使用120 GEV/C Proton束进行了较小的设备。测量的空间分辨率在$ 2.5之间; 70-100垫式几何形状和$ 17 \; $ $ $ $; μm$具有200-500矩阵,比二进制读取中可以实现的要素要好10倍($ bin \; size/ \ sqrt {12} $)。梁测试数据显示$ \ sim 40 \的时间分辨率; PS $ 200- $ $ $ $ $ $的音调设备,符合同样增益的LGAD传感器的最佳性能。

This paper presents the principles of operation of Resistive AC-Coupled Silicon Detectors (RSDs) and measurements of the temporal and spatial resolutions using a combined analysis of laser and beam test data. RSDs are a new type of n-in-p silicon sensor based on the Low-Gain Avalanche Diode (LGAD) technology, where the $n^+$ implant has been designed to be resistive, and the read-out is obtained via AC-coupling. The truly innovative feature of RSD is that the signal generated by an impinging particle is shared isotropically among multiple read-out pads without the need for floating electrodes or an external magnetic field. Careful tuning of the coupling oxide thickness and the $n^+$ doping profile is at the basis of the successful functioning of this device. Several RSD matrices with different pad width-pitch geometries have been extensively tested with a laser setup in the Laboratory for Innovative Silicon Sensors in Torino, while a smaller set of devices have been tested at the Fermilab Test Beam Facility with a 120 GeV/c proton beam. The measured spatial resolution ranges between $2.5\; μm$ for 70-100 pad-pitch geometry and $17\; μm$ with 200-500 matrices, a factor of 10 better than what is achievable in binary read-out ($bin\; size/ \sqrt{12}$). Beam test data show a temporal resolution of $\sim 40\; ps$ for 200-$μm$ pitch devices, in line with the best performances of LGAD sensors at the same gain.

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