论文标题
XPS测量的实验设置超出了仪器横向分辨率极限
Experimental setups for XPS measurements beyond the instrumental lateral resolution limit
论文作者
论文摘要
配备了聚焦X射线梁的X射线光电子光谱仪器的横向分辨率受到名义X射线束直径和X射线梁的长尾强度分散的限制。 X射线束的长尾强度分布阻碍了同时具有良好横向分辨率和低检测极限的测量值。描述了两个实验设置，可以检查小于X射线束尺寸的样品结构。第一种方法通过低能电子洪水在部分非导电样品上使用差分样品。非导电样品区域的光谱转向较低的结合能。这样，独立估计导电和非导电样品区域的表面组成。第二种方法利用了能量分析仪接受量的相当有限的维度。这里只有样品放置在能量分析仪的接受量中。这样，来自照明样品的信号仅有助于测得的光电子强度，独立形成样本量。
The lateral resolution of an X-ray photoelectron spectroscopy instrument, which is equipped with a focused X-ray beam, is limited by the nominal X-ray beam diameter and the long tail intensity distri-bution of the X-ray beam. The long tail intensity distribution of the X-ray beam impedes to perform a measurement with good lateral resolution and low detection limits at the same time. Two experimental setups are described which allow examining sample structures that are smaller than the X-ray beam dimensions. The first method uses differential sample charging on partly non-conductive samples by low energy electron flooding. The spectra of the non-conductive sample areas are shifted towards lower binding energy. That way, the surface compositions of conductive and non-conductive sample areas are estimated independently. The second method utilizes the rather limited dimensions of the energy analyser acceptance volume. Here only the sample is placed inside the energy analyser acceptance volume. That way, signals from the illuminated sample contribute exclusively to the measured photoelectrons intensity, independent form the sample size.
