论文标题
评估金属/铁电/半导体电容器和铁电场效应晶体管中的极化特性
Evaluation of polarization characteristics in metal/ferroelectric/semiconductor capacitors and ferroelectric field-effect transistors
论文作者
论文摘要
在这项研究中，我们提出了一种测量技术，用于评估铁电场效应晶体管（FEFET）中的铁电性极化特性。与标准金属/铁电/金属电容器不同，在评估使用快速电压扫描作为输入的铁电特性时，必须仔细考虑半导体底物中的耗竭和反转现象。发现非平衡的深层消耗是准确评估金属/铁电/半导体电容器中铁电特性的限制因素。通过将FEFET的源，排水和底物连接在一起，在极化测量过程中，可以抑制深层耗竭，并且可以准确评估铁电栅极的铁电性。目前的技术是一种有力的方法，用于捕获FEFET中的极化状态，为设备表征和基本研究提供新的方法，并克服了在2端金属/铁电/半导体助理上的常规极化测量中发现的限制。
In this study, we propose a measurement technique for evaluating ferroelectric polarization characteristics in ferroelectric field-effect transistors (FeFETs). Different from standard metal/ferroelectric/metal capacitors, the depletion and inversion phenomena in semiconductor substrates have to be carefully taken into account when evaluating the ferroelectric properties using fast voltage sweep as input. The non-equilibrium deep depletion is found to be the limiting factor for the accurate evaluation of ferroelectric properties in metal/ferroelectric/semiconductor capacitors. By connecting the source, drain, and substrate of the FeFET together during the polarization measurement, the deep depletion can be suppressed and the ferroelectricity of the ferroelectric gate can be accurately evaluated. The present technique is a powerful method for capturing the polarization states in FeFETs, enabling new approaches for device characterization and fundamental study, and overcomes the limitation found in the conventional polarization measurement on 2-terminal metal/ferroelectric/semiconductor capacitors.
