论文标题

Gigahertz范围内声学设备的中孔薄膜

Mesoporous Thin-Films for Acoustic Devices in the Gigahertz Range

论文作者

Lopez-Abdala, N., Esmann, M., Fuertes, M. C., Angelomé, P. C., Ortiz, O., Bruchhausen, A., Pastoriza, H., Perrin, B., Soler-Illia, G. J. A. A., Lanzillotti-Kimura, N. D.

论文摘要

纳米级上声波的一致操纵通常需要厚度和界面粗糙度定义为原子单层的多层。这导致具有预定功能的昂贵设备。纳米级介孔材料具有高表面与体积的比率和可调整的中孔,这使化学功能化纳入纳米声学。但是,具有与声学波长相当的孔的存在在直觉上被视为纳米声学中的主要障碍。在这里,我们提出了基于中孔SIO $ _2 $薄膜的多层纳米声共振器,显示了5-100 GHz范围内的声音共振。我们使用连贯的声子生成实验表征系统的声学响应。尽管共振波长与孔径相当,但我们首次观察到Q因子左右出乎意料地定义明确的声音共振。我们的结果为基于柔软,廉价的制造方法的纳米声感应和可重新配置的纳米声感应和可重新配置的纳米声感应和可重新配置的纳米声感应和重新配置的途径开辟了道路。

The coherent manipulation of acoustic waves on the nanoscale usually requires multilayers with thicknesses and interface roughness defined down to the atomic monolayer. This results in expensive devices with predetermined functionality. Nanoscale mesoporous materials present high surface-to-volume ratio and tailorable mesopores, which allow the incorporation of chemical functionalization to nanoacoustics. However, the presence of pores with sizes comparable to the acoustic wavelength is intuitively perceived as a major roadblock in nanoacoustics. Here we present multilayered nanoacoustic resonators based on mesoporous SiO$_2$ thin-films showing acoustic resonances in the 5-100 GHz range. We characterize the acoustic response of the system using coherent phonon generation experiments. Despite resonance wavelengths comparable to the pore size, we observe for the first time unexpectedly well-defined acoustic resonances with Q-factors around 10. Our results open the path to a promising platform for nanoacoustic sensing and reconfigurable acoustic nanodevices based on soft, inexpensive fabrication methods.

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