论文标题

单层MOS $ _2 $的电气和热电学性能的可调性通过氧气钝化

Tunability of electrical and thermoelectrical properties of monolayer MoS$_2$ through oxygen passivation

论文作者

Deb, Swarup, Bhattacharyya, Pritam, Chakrabarti, Poulab, Chakraborti, Himadri, Gupta, Kantimay Das, Shukla, Alok, Dhar, Subhabrata

论文摘要

在多种环境和退火条件下,已经研究了使用新型的基于微腔的CVD增长技术生长的严格单层MOS $ _2 $膜的电气和热电性能。在连续单层MOS上制造的热电设备的电阻使用光刻技术在连续的单层MOS $ _2 $层上制造,可在525 k的真空中退火后减少六个级数。当样品暴露于氧气气氛时,这些参数返回到其先前的值。实际上,已经发现,可以通过控制退火和氧气的温度来调整材料的电子浓度,迁移率以及材料的热电功率。一旦建立,只要层不暴露于氧气环境,就可以保持这些值。如果设计有效的封装方法,这可以提供一种独特的方法来控制材料中的掺杂。这种控制是设备应用程序的重要一步。该效果归因于物理氧分子的MOS $ _2 $膜中存在的二硫硫次供体的钝化。使用密度函数理论进行了频带结构计算,结果确实验证了这张图。

Electric and thermoelectric properties of strictly monolayer MoS$_2$ films, which are grown using a novel micro-cavity based CVD growth technique, have been studied under diverse environmental and annealing conditions. Resistance of a thermoelectric device that is fabricated on a continuous monolayer MoS$_2$ layer using photolithography technique has been found to reduce by about six orders of magnitudes upon annealing in vacuum at 525 K. Seebeck coefficient of the layer also reduces by almost an order of magnitude upon annealing. When the sample is exposed to oxygen atmosphere, these parameters return to their previous values. In fact, it has been found that the electron concentration, mobility as well as the thermoelectric power of the material can be tuned by controlling the temperature of annealing and oxygen exposure. Once established, these values are maintained as long as the layer is not exposed to oxygen environment. This can offer a unique way to control doping in the material provided an effective encapsulation method is devised. Such control is an important step forward for device application. The effect has been attributed to the passivation of di-sulfur vacancy donors present in the MoS$_2$ film by physisorbed oxygen molecules. Band structural calculations using density functional theory have been carried out, results of which indeed validate this picture.

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