论文标题
射电气排放的血浆分层
Plasma Stratification in Radio-Frequency Discharges of Noble Gases
论文作者
论文摘要
我们对氩气的电容耦合等离子体中的站立条纹进行了实验研究和计算机模拟。在压力范围为0.05-10 TORR的压力范围内，在频率3.6、8.4和19.0 MHz处观察到站立条纹，管半径r = 1.1 cm，对于一定范围的排放电流（等离子体密度）。数值模拟显示，在类似的放电条件下，CCP中静态条纹的性质和直流放电中的移动条纹的性质相似。将计算机模拟与实验观察的比较有助于阐明这些条纹的性质。电离速率对电子密度的非线性依赖性被证明是分层现象的主要基础机制。
We conducted experimental studies and computer simulations of standing striations in capacitive coupled plasma in Argon gas. Standing striations were observed at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10 Torr, tube radius R=1.1 cm, for a certain range of discharge currents (plasma densities). Numerical simulations revealed similar nature of standing striations in CCP and moving striations in DC discharges under similar discharge conditions. Comparison of computer simulations with experimental observations helped clarify the nature of these striations. The non-linear dependence of the ionization rate on electron density is shown to be the main underlying mechanism of the stratification phenomena.
